Experimental and theoretical investigations of low-pressure CVD of Cu using CuI as precursor

Möller, A.; Kall, R.; Till, V.; Wortberg, Gerd; Adomeit, Gerhard

Amsterdam : North-Holland Publ. Co. (1997)
Contribution to a conference proceedings, Journal Article

In: Journal of crystal growth
Volume: 174
Issue: 1/4
Page(s)/Article-Nr.: 837-844